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(a) Schematic of 2 × 2 Mach-Zehnder interferometer (MZI) switch cell. Cross-sections of waveguide phase shifters: (b) thermo-optic (T-O) phase shifter using a metal heater (c) T-O phase shifter using a doped resistive heater (d) suspended T-O phase shifter using a metal heater (e) electro-optic (E-O) phase shifter.
