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. 2019 Jan 13;10(1):51. doi: 10.3390/mi10010051

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© 2019 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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Schematic of (a) a switch based on vertically MEMS-actuated directional waveguide coupler (b) a switch based on vertically MEMS-actuated adiabatic waveguide coupler (c) a switch based on laterally MEMS-actuated directional waveguide coupler (d) a switch based on laterally MEMS-actuated MRR (e,f) a switch based on rotationally MEMS-actuated waveguide.