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Acquisition parameters for survey and high-resolution X-ray photoelectron spectrometer (XPS) spectra.
| Scan Type | Start Energy | End Energy | Step Width | dE | Dwell Time | # of Scans | Beam Power |
|---|---|---|---|---|---|---|---|
| Survey | 1300 eV | 0 eV | 1 eV | 4 eV | 100 ms | 5 | 150 W |
| High resolution | A window of ~20 eV width around the peak. | 0.1 eV | 0.3 eV | 300 ms | 10 | 300 W | |
