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. 2019 Feb 4;9:1395. doi: 10.1038/s41598-019-38554-2

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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(a) Working mechanism of PDT: Light exposure excites the photosensitizer molecule from ground singlet state (S₀) to an excited state (S₁). The molecule in S1 may undergo intersystem crossing to an excited triplet state (T₁) then either form radicals via Type 1 reaction or transfers its energy to triplet oxygen (³O₂) to form a singlet oxygen (¹O₂), which is major cytotoxic agent via Type II reaction^4,5. (b) Illustration of implantable µLight in a deep-seated tumor: ultrasonic waves applied from an external transducer travel through tissue to trigger light generation by the μLight, thus activating a pre-delivered photosensitizer, which in turn generates reactive oxygen species (ROS) to kill cancer cells. (c) Ultrasonic powering: Schematics of the power transfer link and its theoretical electromechanical model³³ © 1999 IEEE. Reprinted, with permission, from Sherrit, S., Leary, S. P., Dolgin, B. P. & Bar-Cohen, Y. Comparison of the Mason and KLM equivalent circuits for piezoelectric resonators in the thickness mode. 1999 IEEE Ultrason. Symp. Proceedings, Int. Symp. (d) Fabrication process for the μLight: (a) dice PZT into 2 × 2 × 2 mm³ and 2 × 4 × 2 mm³ pieces, (b) solder one LED between the nickel electrodes, (c) solder another LED with reverse polarity on the opposite side (more LEDs can be soldered on the two remaining sides), (d) parylene-C coat the device for passivation, (e) optical photographs of fabricated prototypes.