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Film thickness (nm) after 15 minutes, 3 hours and 4 days of exposure to water as measured by spectroscopic ellipsometry for Ti-thymine (at 225 °C), Ti-uracil (at 225 °C), Ti-adenine (at 250 °C).
| Thickness (nm) | Ti-thymine | Ti-uracil | Ti-adenine |
| Initial thickness | 97.7 | 76.2 | 87.6 |
| 15 minutes | 30.6 | 32.1 | 31.3 |
| 3 hours | 29.4 | 28.5 | 29.8 |
| 4 days | 30.9 | 28.6 | 30.0 |
