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. 2019 Feb 11;9:1773. doi: 10.1038/s41598-018-38043-y

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Raman spectra of the ITO films irradiated at different laser fluence values. The PET peaks remain unchanged and there is no appearance of a D-band carbon peak in the spectrum at around 1365 cm⁻¹ supporting the conclusion that the substrate is undamaged by the process.