Skip to main content
. 2018 Sep 24;24(5):526–544. doi: 10.1017/S1431927618015015

Table 1.

Options for Coatings and Scanning Electron Microscopy (SEM) Operation.

Pt-sputter Coating Carbon Coating Carbon Coated Slide Pt-Deposition kV Detector
High-resolution SEM 3–5 nm 0.8–1 SE/in-lens SE
High res. immuno-SEM (10 nm gold) 3–5 nm (+) 1–2 5–20 EsB QBSD
High res. immuno-SEM (5 nm gold) + 1 5–20 EsB QBSD
SEM for depth information 3–5 nm 5–30 QBSD
SEM for element analysis 3–15 nm 1–30 EDX
CPD+FIB/SEM 3–15 nm (0.5–1 µm) 1.5 EsB
Flat embedded+FIB/SEM 10–30 nm (0.5–1 µm) 1.5 EsB

SE, secondary electrons; EsB, energy selective backscattered electron; QBSD, quadrant backscatter electron detector; EDX, energy dispersive X-ray; CPD, critical point dried; FIB, focused ion beam.