Table 1.
Pt-sputter Coating | Carbon Coating | Carbon Coated Slide | Pt-Deposition | kV | Detector | |
---|---|---|---|---|---|---|
High-resolution SEM | 3–5 nm | 0.8–1 | SE/in-lens SE | |||
High res. immuno-SEM (10 nm gold) | 3–5 nm | (+) | 1–2 5–20 | EsB QBSD | ||
High res. immuno-SEM (5 nm gold) | + | 1 5–20 | EsB QBSD | |||
SEM for depth information | 3–5 nm | 5–30 | QBSD | |||
SEM for element analysis | 3–15 nm | 1–30 | EDX | |||
CPD+FIB/SEM | 3–15 nm | (0.5–1 µm) | 1.5 | EsB | ||
Flat embedded+FIB/SEM | 10–30 nm | (0.5–1 µm) | 1.5 | EsB |
SE, secondary electrons; EsB, energy selective backscattered electron; QBSD, quadrant backscatter electron detector; EDX, energy dispersive X-ray; CPD, critical point dried; FIB, focused ion beam.