Table 1.

Sample matrix with implantation parameters and refined SAXS bubble size distributions and inter-bubble distances (order parameter in parentheses) and converted GBS lattice parameters.

Sample	Temp (°C)	Fluence (1017 ions/cm2)	Flux (×1012 ions/cm2/s)	Size (Å)	Inter-bubble distance (Å)	GBS lattice parameter (Å)
13*	650	1.0	6.2	23.7 ± 5.2	44.4 (19.3)	62.8
14*	500	1.0	6.2	14.4 ± 5.4	34.8 (16.2)	49.2
15	350	1.0	6.2	11.2 ± 2.5	—	—
17	500	0.6	2.7	18.1 ± 6.1	40.7 (21.3)	—
16*	500	1.0	2.7	22.8 ± 4.9	41.7 (21.7)	59.0
18*	500	2.0	2.7	23.3 ± 3.9	41.0 (14.5)	58.0
14*	500	1.0	6.2	14.4 ± 5.4	34.8 (16.2)	49.2
16*	500	1.0	2.7	22.8 ± 4.9	41.7 (21.7)	59.0
19	500	1.0	0.9	24.9 ± 5.0	41.5 (22.4)	—
ref. 13	500	1.1	—	13.0 ± 2.0	30.1	42.6
ref. 13	500	1.5	—	16.1 ± 2.7	38.7	54.7
ref. 38	500	1.5	—	20.0 ± 2.0	43.0	60.8
ref. 38	600	1.0	—	17.3 ± 1.0	39.0	55.2
ref. 39	600	3.0	—	22.4 ± 2.0	39.0	55.2

^*Indicates samples that have gas bubble superlattices.