Table I.
Parameter | This work | [12] | [13] | [25] | [32] | [33] |
---|---|---|---|---|---|---|
Single chip integrated Tx-Rx system | Yes | No | No | No | No | No |
Shared Tx-Rx array aperture with pitch match | Yes | No | N/A | No | No | No |
Rx wire reduction | TDM | ADC + S/H analog | ADC + FIFO | S/H analog | Analog filter | S/H + Digital |
Tx Wire reduction | Yes | No | No | No | No | No |
Rx raw data accessibility | Yes | No | Yes | No | No | No |
Center frequency (MHz) | 7 | 5 | 5 | 5 | 40 | 3 |
Tx delay min (ns)/max(μs) | 5/10.235 | - | - | - | - | - |
Die size (mm2) | 2.6×11 | 2.5×4.8 | 2.93×3.2 | 6.1×6.1 | 1.2×0.3 | 4.5×4.3 |
Power/ Rx channel (mW) | 6.26 | 0.91 | 17.5 | 0.27 | 4.62 | 17.81 |
Active area/ channel (mm2) | 0.27 | 0.026 | 0.088 | 0.026 | 0.045 | 0.303 |
Power/ Rx active area (mW/ mm2) | 23.18 | 35 | 198.96 | 10.38 | 102.66 | 58.77 |
# of channels | 64Tx/64Rx | 144Rx | 16Rx | 1024RX | 8Rx | 64Rx |
# of wires / Rx channels | 8/64 | 4/144 | 1/16 | 96/1024 | 1/8 | 1/64 |
# of wires/ Tx channels | 0.0625 (4/64) | 1 | 1 | 1 | 1 | 1 |
Tx amplitude | 60V | - | - | - | - | - |
Transducer | ID PZT/CMUT | 2DPZT | 2DCMUT | 2DPZT | Annular CMUT | 2D CMUT |
Process | 0.18 μm HV | 0.18 μm | 28 nm | 0.18 μm | 0.35 μm | 0.13 μm |