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. 2019 Feb 28;14:72. doi: 10.1186/s11671-019-2906-1

Table 1.

Geometric parameters of the bilayer sensor

Thickness of thin films Dimensions of thin films Height of pillars Diameter of pillars Distances between two diagonal pillars
50 μm 10 × 10 mm2 1 mm 1 mm 11 mm