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. 2019 Mar 5;9:3447. doi: 10.1038/s41598-019-40120-9

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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(a) Light output power versus current characteristics and (b) current versus voltage characteristics of green LEDs on LT-GaN and sputtered AlN/sapphire templates. (c) Dependence of EQE on the injection current density of green LEDs. (d) Peak emission wavelength and (e) FWHM versus injection current for the green LED on sputtered AlN (33 nm)/sapphire template. (f) Dependence of light output power on emission peak wavelength for green LEDs on LT-GaN and sputtered AlN/sapphire templates at 20 mA.