Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
RPALD HfO2 deposition parameters
| RPALD- HfO2 thin film | |
| Parameter | Value |
| Substrate temperature (°C) | 250 |
| TEMAH pulse time (s) | 1.6 |
| O2 plasma pulse time (s) | 10 |
| O2 plasma power (W) | 2500 |
| Thickness (nm) | 15 |
| RTA-post annealing process | |
| Parameter | Value |
| Temperature (°C) | 400–600 |
| Time (min) | 20 |
| Ambient | N2 |
