Table 1.

Summary of the morphological and structural properties of TiO₂ thin films deposited at different temperatures.

deposition temperature (°C)	thickness (nm)	RMS (nm)	phase	mean crystallinity size (nm)	degree of crystallinity (%)
250	110	n.a.	anatase	13	33
350	180	0.8	anatase	35	85
450	240	1.2	anatase	32	98