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. 2019 Jan 24;10(2):85. doi: 10.3390/mi10020085

Figure 11.

Figure 11

Electrostatic MEMS scanner with switchable lateral and vertical scanning capability. (a) Demonstration of the lateral X-axis and Y-axis scanning for horizontal cross-sectional imaging. (b) Demonstration of the translational Z-axis scanning for vertical cross-sectional imaging. Reproduced with permission from [48]; published by OSA, 2016.