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. 2019 Feb 16;10(2):130. doi: 10.3390/mi10020130

Figure 2.

Figure 2

Schematic of a SU-8 mold fabrication process. (a) Ring formation from a silicone sheet. (b) Placement of a rubber sheet on a wafer. (c–g) Fabrication of a polydimethylsiloxane (PDMS) microchamber from a SU-8 mold. (c) SU-8 dispensing, (d) flattening by gravity. (e) SU-8 photolithography. (f) PDMS molding. (g) Release of the PDMS micro chamber. (h–m) Fabrication of the SU-8 blocks. (h) Dispensing of a dextran solution. (i) Spin-coating of the dextran. (j) SU-8 dispensing. (k) Flattening by gravity. (l) SU-8 photolithography. (m) Release of the SU-8 blocks in water.