Table 1.

M/NEMS-based resonators for gravimetric cigarette smoke detection.

M/NEMS Resonator	Particle Sampler	PLL for Frequency Tracking	Mass Sensitivity	Mass Resolution	Reference
FBAR 1	thermophoretic	integrated	not given	2 µg/m3	[11]
TPR 2	impactor	not given	42 Hz/pg	not given	[13]
TPR 2	impactor	external	1.9 Hz/pg	29.8 fg	[14]
PCR-NWA 3	no	no	20 Hz/ng	50–100 pg	[40]
PCR 4	electrostatic	integrated	12 Hz/ng	76.2 pg	[16]
PPR 5	no	integrated	8.8 Hz/ng	114 pg	This work

¹ FBAR: film bulk acoustic resonator. ² TPR: thermal-piezoresistive resonator. ³ PCR-NWA: piezoresistive cantilever resonator with nanowire array. ⁴ PCR: piezoresistive cantilever resonator. ⁵ PPR: piezoelectric plate resonator.