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EDS elemental composition percentage of the 150 nm SS fabricated film at 0.05 Å/s controlled deposition rate.
| Element | Mass % | Atom % | Sigma | Net | K ratio |
|---|---|---|---|---|---|
| Iron | 69.52 | 68.62 | 0.05 | 2879132 | 0.3919295 |
| Chromium | 21.33 | 22.61 | 0.03 | 1347161 | 0.1368063 |
| Nickel | 4.76 | 4.47 | 0.03 | 131065 | 0.0250911 |
| Manganese | 4.15 | 4.16 | 0.03 | 201285 | 0.0236898 |
| Molybdenum | 0.25 | 0.14 | 0.03 | 12922 | 0.0009314 |
| Total | 100 | 100 | - | - | - |
