Table 3.
Height Parameters | Film Thickness (nm) | |||
---|---|---|---|---|
0 | 50 | 100 | 150 | |
Root mean square roughness (nm) | 12 | 11.5 | 9.62 | 6.86 |
Skewness | −1.08 | −1.0 | −0.654 | −0.535 |
Kurtosis | 16.8 | 18 | 19.6 | 6.39 |
Maximum peak height (nm) | 131 | 119 | 119 | 55.4 |
Maximum valley depth (nm) | 160 | 149 | 118 | 64.1 |
Maximum height of surface (nm) | 291 | 268 | 236 | 120 |
Average roughness (nm) | 7.87 | 7.48 | 6.0 | 4.88 |