Table 1.
PDMS wet-etching rates using TBAF solution.
| NMP:TBAF (v/v) | 3:1 (25%) | 5:1 (12%) | 10:1 (9%) | 15:1 (6%) |
| Etching rate (μm/min) | 3.7 | 2.8 | 2 | 1.3 |
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