Table 2.
Chemical names frequently found in the material safety data sheets (MSDSs) of photoresist (PR) products
| No. | Constituent | CAS no. | Frequency of usage |
|---|---|---|---|
| 1 | Trade secret ingredients∗ | — | 116 |
| 2 | Propylene glycol monomethyl ether acetate | 108-65-6 | 33 |
| 3 | Cyclohexanone | 108-94-1 | 11 |
| 4 | Propylene glycol monomethyl ether | 107-98-2 | 7 |
| 5 | 2-Heptanone | 110-43-0 | 7 |
| 6 | Ethyl 3-ethoxypropionate | 763-69-9 | 7 |
| 7 | Other ingredients† | — | 57 |
| Total ingredients | 238 | ||
CAS, Chemical Abstracts Service.
∗
Trade secret ingredients are shown in Table 3.
†
Other ingredients are shown in Supplementary table 1.