Table 4.
Information on carcinogens specified in the material safety data sheets (MSDSs) for photoresist (PR) products
| Constituent∗ | CAS No.∗ | No. of products | Content (%)∗ | Korea MOEL† | IARC‡ | ACGIH§ | NTP‖ | EU CLP¶ |
|---|---|---|---|---|---|---|---|---|
| Cyclohexanone | 108-94-1 | 11 | 3–40 | Car. 2 | Group 3 | A3 | ||
| Ethylbenzene | 100-41-4 | 1 | 0.1–1.0 | Car. 2 | Group 2B | A3 | ||
| Pyridine | 110-86-1 | 1 | 0.1–1.0 | Car. 2 | Group 3 | A3 | ||
| 1,4-Dioxane | 123-91-1 | 4 | <1.0 | Car. 2 | Group 2B | A3 | R | Car. 2 |
ACGIH, American Conference of Governmental Industrial Hygienists; CAS, Chemical Abstracts Service; IARC, International Agency for Research on Cancer; MOEL, Ministry of Employment and Labor.
The name of constituent, CAS number, and content (%) are only specified in the MSDS, and the toxic information of each institute was accessed as follows: Korea MOEL (2018.03.20), ACGIH (2018 booklet), IARC (2018.04.18), NTP (14th report), and EU CLP (Annex vi table 2018).
Ministry of Employment and Labor, Carcinogen classifications – Carcinogen 1A: Sufficient evidence of carcinogenicity to human, Carcinogen 1B: Sufficient evidence of carcinogenicity to animals or limited evidence of carcinogenicity to human and animals, Carcinogen 2: Insufficient evidence of carcinogenicity to humans and animals.
International Agency for Research on Cancer, Carcinogen classifications – Group 1: Carcinogenic to humans, Group 2A: Probably carcinogenic to humans, Group 2B: Possibly carcinogenic to humans, Group 3: Not classifiable as to its carcinogenicity to humans, Group 4: Probably not carcinogenic to humans.
American Conference of Governmental Industrial Hygienists, Carcinogen classifications – A1: Confirmed human carcinogen, A2: Suspected human carcinogen, A3: Confirmed animal carcinogen with unknown relevance to humans, A4: Not classifiable as a human carcinogen, A5: Not suspected as a human carcinogen.
National Toxicology Program, Carcinogen classifications – K: Known to be human carcinogens, R: Reasonably anticipated to be human carcinogens.
Classification, Labeling, Packing of substances and mixture, Carcinogen classifications – Carcinogen 1A: Known to have carcinogenic potential for humans, Carcinogen 1B: May cause cancer, Carcinogen 2: Suspected of causing cancer.