Table 1.

Operation conditions for laser ablation.

Parameter	Value
Laser wavelength	193 nm
Pulse Width	4 ns
Ablation progression speed	50–200 μm s−1
Frequency of laser shots	5–20 Hz
Laser energy	6 and 9 J cm−2
Beam size	10–150 μm
Repeated ablations	1–100 times
Defocus distance	0–1000 μm