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. 2016 Dec 19;2:16065. doi: 10.1038/micronano.2016.65

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Copyright © 2016 The Author(s)

This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

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(a) The fabricated tactile sensor array. (b) The flexibility of the sensor array. (c and d) Scanning electron microscope images of 50-μm micropyramids incorporated in the sensing layer.