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. 2016 Feb 15;2:15043. doi: 10.1038/micronano.2015.43

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Copyright © 2015 IECAS

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Measurements of the spatial shift in the transferred images in the polymer of a straight photomask edge for different exposure times and formulation stoichiometric ratios (n = 12). The graph demonstrates reduced broadening for highly off-stoichiometry formulations.