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. 2016 Jun 20;2:16024. doi: 10.1038/micronano.2016.24

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Copyright © 2016 © 2016 Institute of Electronics, Chinese Academy of Sciences

This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

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Hybrid system integration inside an SEM. (a) A hybrid AFM/SEM system based on laser beam deflection by DME-SPM. (b) AttoAFM/SEM system with a fiber-optic configuration by Attocube Systems AG. (c) A hybrid AFM/SEM system using self-sensing piezoresistive cantilevers. Adapted from Ref. 43. (d) An AFM system in dynamic mode for SEM integration by Trioptics. (e) 3TB4000 AFM/FIB/SEM system from Nanonics Imaging Ltd. (f) A hybrid AFM/FIB/SEM system. Adapted from Ref. 40. (g) A hybrid SEM and TEM manipulation system. Reprinted with permission from Ref. 13. AFM, atomic force microscope; FIB, focused ion beam; TEM, transmission electron microscope.