Table 1. Summary of commercial nanomanipulation systems.
| System | Speed | Coarse motion range | Fine motion range | DOF | Coarse resolution | Fine resolution |
|---|---|---|---|---|---|---|
| Zyvex S100 | 3 mm s−1 | 12 mm XYZ | 50 μm for XY; 10 μm for Z; | Four units with 24 axes | 100-nm open loop | 5-nm open loop |
| Xidex NanoBot NX-2000 | 1 mm s−1 | 12 mm XYZ | 5 μm XYZ | Two units with six axes | 50-nm open loop | 1-nm open loop |
| Oxford Instruments OmniProbe 400 | N/A | 4 mm XYZ | Not specified | One unit (four axes with one rotation) | 10-nm closed loop | N/A |
| TNI LifeForce | >10 mm s−1 | 10 mm XY 5 mm Z | 30 μm XYZ | Four units with 12 axes | <100-nm open loop | 0.1-nm open loop 1-nm closed loop |
| Kleindiek MM3A | 2 mm s−1 telescoping; 10 mm s−1 rotation | 12-mm telescoping; 240° rotation | Not specified | One translation Two rotations | 5-nm open loop rotation; 0.5-nm open loop translation | N/A |
| SmarAct SLC | >10 mm s−1 | 10 mm XYZ | 1.5 μm XYZ | Four units with 12 axes | 20-nm closed loop | 1-nm closed loop |
| Imina miBot BT-11 | 2.5 mm s−1 | Unlimited XY 10 mm Z | 440 nm XY 780 nm Z | Two translations Two rotations | 40-nm open loop | 0.5-nm open loop |
Abbreviation: DOF, degrees of freedom.