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. 2016 Sep 12;2:16045. doi: 10.1038/micronano.2016.45

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Copyright © 2016 The Author(s)

This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

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(a) Schematic overview of the longitudinal deformation of a flexible bending actuator fabricated using only lithography process steps. This actuator essentially consists of an asymmetric void (hatched) surrounded by a highly flexible material (blue). (b) General 3D topology of a soft bending actuator that consists of an internal void between two layers of PDMS that can be inflated through a pressure supply hole. A quarter of the actuator is removed to show cross-sectional cuts. (c) Schematic overview of the cross-sectional deformation of a flexible bending actuator, showing its rectangular topology. (d) Overview of the full lithographical process to produce these actuators, using RIE etching of PDMS with a LOR/SU8 masking layer to define the outer contours. PDMS, polydimethylsiloxane; 3D, three-dimensional.