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. 2016 Sep 12;2:16045. doi: 10.1038/micronano.2016.45

Figure 3.

Figure 3

(a) Top view of a flexible fluidic actuator with a highlighted inflatable void that was fabricated using a purely lithographical production process. The outer dimensions of the actuator are 5.5 mm×1 mm, with PDMS layers of ≈37 and ≈13 μm and an inflatable void height of ≈10 μm. (b) Bending deformation of this flexible fluidic actuator upon pressurization up to a pressure of 200 kPa. PDMS, polydimethylsiloxane.