Skip to main content
. 2016 Sep 12;2:16045. doi: 10.1038/micronano.2016.45

Table 1. Literature overview of RIE of PDMS.

RIE gasses Gas ratio Etch rate (μm h−1) Mask
SF6 —, Vlachopoulou23 48 Aluminum
CF4:O2 3:1, Garra12 20 Aluminum
  1:1, Oh11 60 AZ9260
SF6:O2 4:1, Bjørnsen24 30 Glass slide
  3:1, Szmigiel25 72 Aluminum
He:SF6 95:5, Tserepi26 72 AZ5214

Abbreviations: PDMS, polydimethylsiloxane; RIE, reactive ion etching.