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(a) Schematic view of the SD-BAW gyroscope. An active resonating gyro region is effectively decoupled from the substrate by a stress decoupling structure. (b) Electrodes with ultra-narrow capacitive gaps (270 nm) created with the HARPSS process are used for electrostatic actuation and readout. HARPSS, high aspect-ratio poly and single-crystal silicon; BAW, bulk-acoustic wave; SD, substrate-decoupled.
