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. 2016 Apr 25;2:16015. doi: 10.1038/micronano.2016.15

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Copyright © 2016 © 2016 Institute of Electronics, Chinese Academy of Sciences

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Quality factor variation over temperature of the second elliptical (n=3) modes of an SD-BAW gyroscope (a) and a center-supported BAW disk resonator implemented on a (100) SCS substrate (b). BAW, bulk-acoustic wave; SCS, single-crystal silicon; SD, substrate-decoupled.