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. 2016 Apr 25;2:16015. doi: 10.1038/micronano.2016.15

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Copyright © 2016 © 2016 Institute of Electronics, Chinese Academy of Sciences

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Output response of SD-BAW gyroscope to rotation-rate stimuli in increments of 62.5° s⁻¹ and up to ±1250° s⁻¹. The measured non-linearity in this range is 0.07%, which is limited by the interface electronics. BAW, bulk-acoustic wave; SD, substrate-decoupled.