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. 2016 Apr 25;2:16015. doi: 10.1038/micronano.2016.15

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Copyright © 2016 © 2016 Institute of Electronics, Chinese Academy of Sciences

This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

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Modal simulation response of the second elliptical (n=3) in-plane modes of an SD-BAW gyroscope with 420 μm radius, created on a 40-μm-thick (100) SCS substrate (electrodes not shown; total displacement normalized with respect to mass matrix). BAW, bulk-acoustic wave; SCS, single-crystal silicon; SD, substrate-decoupled.