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. 2016 Apr 25;2:16015. doi: 10.1038/micronano.2016.15

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Copyright © 2016 © 2016 Institute of Electronics, Chinese Academy of Sciences

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(a) Electrode configuration for the SD-BAW gyroscope. (b) Simulated electrostatic frequency-tuning and stiffness-decoupling for an imperfect (ellipsoidal) SD-BAW gyroscope. Mode decoupling was achieved with V_Q2=1.95 V, and mode matching was achieved at V_T1=3.15 V. The resonator was biased at V_P=18 V with all other electrodes at a common-mode voltage of 2.5 V. The residual split was less than 0.05 Hz using a voltage resolution of 10 mV. BAW, bulk-acoustic wave; SD, substrate-decoupled.