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. 2016 Apr 25;2:16015. doi: 10.1038/micronano.2016.15

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Copyright © 2016 © 2016 Institute of Electronics, Chinese Academy of Sciences

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Simulation response for the two lowest resonance-frequency modes of an SD-BAW gyroscope. (a) The teeter−totter mode has a resonance frequency of 200 kHz, and (b) the in-plane translational mode has a resonance frequency of 300 kHz. BAW, bulk-acoustic wave; SD, substrate-decoupled.