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. 2016 Apr 25;2:16015. doi: 10.1038/micronano.2016.15

Figure 9.

Figure 9

Frequency response of SD-BAW gyroscope at pickoff electrodes aligned directly (a, c) and orthogonal (b, d) to the mode being excited. Plots on the left are for the native response of the device, plots on the right are measured after frequency tuning and mode decoupling have occurred. BAW, bulk-acoustic wave; SD, substrate-decoupled.