Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
| Parameter | BAW disk resonator | SD-BAW gyroscope |
|---|---|---|
| Resonance frequency, f0 | 7.2 MHz | 4.3 MHz |
| Squeeze-film damping, QSFD | 15 000 000 (1 Torr) 1 500 000 (10 Torr) | 11 000 000 (1 Torr) 900 000 (10 Torr) |
| Thermoelastic damping, QTED | 150 000 | 74 000 |
| Anchor loss, Qanchor | 78 000 | 750 000 000 |
| Total loss @ 10 Torr, QTOTAL | 49 000 | 68 000 |
BAW, bulk-acoustic wave; SD, substrate-decoupled; TED, thermoelastic damping.
