Table 2. Performance metrics of the SD-BAW gyroscope.

Parameter	Value	Units
Scale factor	800	μV (°s−1)−1
Full-scale range	±1250	°s−1
Non-linearity	0.07	%
Angle random walk	0.39	°/√h
Bias instability	10.5 (with ASIC) 3.5 (external electronics)	°h−1
Offset over temperature	±26 (measured) ±6.7 (with linear slope)	°s−1
Random vibration sensitivity	0.012	°s−1 gRMS−1
Max. offset at 40 g shock	1.75	°s−1

ASIC, application-specific integrated circuit; BAW, bulk-acoustic wave; SD, substrate-decoupled.