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. 2017 Oct 23;3:17061. doi: 10.1038/micronano.2017.61

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Copyright © 2017 The Author(s)

This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

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False color scanning electron microscope-micrographs of a fabricated electro-optomechanical device. (a) The integrated Mach-Zehnder interferometer is shown in blue. The mechanical resonator, which is evanescently coupled to the waveguide, is shown in green, while the metal electrodes are shown in golden color. (b) Detailed view of the free-standing resonator. The photonic crystal mirror separates the optical components from the electrode section. Images reprinted from Ref. 95, with the permission of AIP Publishing.