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. 2017 Oct 23;3:17061. doi: 10.1038/micronano.2017.61

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Copyright © 2017 The Author(s)

This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

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(a) The all-diamond scanning probe made of diamond cantilevers with diamond nanopillar are glued to a quartz tip. (b) Optical microscope image during the transfer process of the diamond probe to the atomic force microscopy (AFM) head. (c) Scanning electron microscope (SEM) image of the scanning probe attached to an AFM tuning fork. (d) SEM image of the final scanning probe attached to the end of the quartz tip. The cantilever was 20 μm long, 3 μm wide and connected to the diamond substrate via 500 nm bridges. The NV-center was created by ¹⁴N implantation at a depth of only 9 nm, reaching a trade-off with a spin coherence time of 76 μs (a shallow depth gives higher resolution, but also shorter coherence time due to proximal surface spins, and thus, lower sensitivity). Images reprinted from: Ref. 87, with the permission of AIP Publishing.