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(a) Electrical–mechanical–acoustic model. Voltage V and current im, force F and velocity at the center of the PMUT vp, and pressure P and volume velocity Vv are the variables for the electrical, mechanical, and acoustical domains, respectively. (b) Schematics (left) and scanning electron microscope (SEM) image (right) of a PMUT cross-section. The Ge bond in the SEM image was broken during sample preparation.
