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. 2017 Nov 20;3:17059. doi: 10.1038/micronano.2017.59

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Copyright © 2017 The Author(s)

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(a) Frequency response in air and fluid from the simulation and analytical solution (top). Peak velocity from the analytical solution (bottom). (b) The resistive r_r and inductive x_r terms in the acoustic radiation impedance plotted versus ka. (c) Fill-factor (top) and computed pressure output (bottom) versus PMUT size.