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. 2017 Nov 20;3:17059. doi: 10.1038/micronano.2017.59

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Copyright © 2017 The Author(s)

This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

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(a) Modeled and measured resonance frequency in air and fluid (top). Modeled and measured static displacement (bottom). (b) Modeled and measured peak displacement in fluid (top) and in air (bottom) (c) Pressure output of the rectangular (top) and circular (bottom) PMUT arrays measured with a hydrophone 220 and 400 μm from the piezoelectric micromachined ultrasonic transducer (PMUT) array. Black: time-domain; Red: FFT. (d) The normalized pressure field at a 500-μm distance from the PMUT array measured by translating the hydrophone along the y-axis when transmitting with one column (top) and three columns (bottom).