Table 1. Performance metrics and specifications of the anisotropically wet-etched resonant pitch/roll gyroscope.

Parameter	Value	Unit
Resonator size	1×1.3	mm×mm
Top gap size	510	nm
Slanted gap size	540	nm
Resonance frequency	201.7592	kHz
Mode-matched Q
Drive	21 000
Sense	27 000
Δfmin
w/o VQ	64	Hz
w/ VQ	<0.1
Scale factor
w/o VQ	3.42	pA (° s−1)−1
w/ VQ	64.4
ARW	0.63	° √h−1
Bias instability	37.7	° h−1

Abbreviations: ARW, angle random walk; w/, with; w/o, without.