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. 2017 Mar 27;3:16087. doi: 10.1038/micronano.2016.87

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Copyright © 2017 The Author(s)

This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

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(a) Diffraction phase microscopy (DPM) topography at various test concentrations. Noise values were <3 nm. (b) Average cross-section profiles of a 40×70 μm cantilever with 50 nm of palladium (Pd) at various test concentrations. Note that the cross-section profiles of the cantilever are not to scale. The maximum deflection at the tip is only 2% of the cantilever’s length.