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. 2017 Mar 27;3:16087. doi: 10.1038/micronano.2016.87

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Copyright © 2017 The Author(s)

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(a and b) Temporal response of change in curvature to a pulse train of H₂ at two sets of hydrogen concentrations of [0.2%, 1.0%] and [250 p.p.m., 0.2%], respectively. Dimensions of the cantilever: 40×70 μm, h _Pd=50 nm and h _s=1010 nm. (c) The measured change in curvature versus hydrogen concentration. h is the layer thickness; subscripts ‘s’ and ‘Pd’ denote the SiN _x substrate and the Pd film.