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. 2017 Apr 10;3:17002. doi: 10.1038/micronano.2017.2

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Copyright © 2017 The Author(s)

This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

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SEM image of (a) the top view of the interposer with empty vias and the adjacent pads. (b) Via filled with the dielectric and Au UBM dispensed on top by SIJ. Scales are 100 and 50 μm, respectively. SEM, scanning electron microscope; SIJ, super inkjet; UBM, under bump metallization.