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| Material specifications | |
| Liquid polymer pre-cursor before curing | |
| Viscosity (mPa s) | 12 |
| Hybrid polymer after photocuring (λ=365 nm) and hardbake (140–160 °C) | |
| Volume shrinkage during UV curing (%) | 5–7 |
| Volume shrinkage during hardbake (%) | 1–2 |
| CTE (20–100 °C) (p.p.m. K−1) | 60 |
| Young’s modulus (GPa) | ~1 |
| Hardness (by indentation) (MPa) | ~68 |
