Table 2.
Ion implanted distribution in sapphire: Peak of depth under the substrate surface (RP) and their FWHM.
| Implanted Ions | Sapphire Matrix | |
|---|---|---|
| RP (nm) | FWHM (nm) | |
| Pt | 335 | 186 |
| Au | 329 | 187 |
| Ag | 520 | 251 |
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